用氫火焰離子化檢測器的氣相色譜儀進(jìn)行測定,最后換算成總碳的含量。結(jié)果發(fā)現(xiàn),高純?nèi)葰涔柚械募谆裙柰?、甲基三氯硅烷、二甲基二氯硅烷等可能的含碳物質(zhì)在轉(zhuǎn)化爐內(nèi)均具有良好的轉(zhuǎn)化率,轉(zhuǎn)化率大于85%。樣品中含碳量的測定結(jié)果之間重復(fù)性好,精密度較高,相對標(biāo)準(zhǔn)偏差均小于10%。方法簡單、快捷,準(zhǔn)確度高,能很好地滿足高純?nèi)葰涔铇悠分袑嘉镔|(zhì)的質(zhì)量控制要求。

　　名稱:DC-550填充柱

　　規(guī)格:3m*1/8

　　使用溫度:240°C

　　貨號:20231123006

　　應(yīng)用:三氯氫硅，四氯化硅等分離

　　Measure using a gas chromatograph with a hydrogen flame ionization detector and convert it to the total carbon content. The results showed that possible carbon containing substances such as methyldichlorosilane, methyltrichlorosilane, and dimethyldichlorosilane in high-purity trichlorosilane all had good conversion rates in the conversion furnace, with conversion rates exceeding 85%. The determination results of carbon content in the sample have good repeatability and high precision, with relative standard deviations less than 10%. The method is simple, fast, and has high accuracy, which can well meet the quality control requirements for carbon containing substances in high-purity trichlorosilane samples.

　　Name: DC-550 filled column

　　Specification: 3m * 1/8

　　Operating temperature: 240 ° C

　　Product number: 2023112306

　　Application: Separation of trichlorosilane, tetrachlorosilane, etc